Cover DIN EN 60204-33 VDE 0113-33:2011-11

DIN EN 60204-33 VDE 0113-33:2011-11

Safety of machinery – Electrical equipment of machines

Part 33: Requirements for semiconductor fabrication equipment

(IEC 60204-33:2009, modified); German version EN 60204-33:2011
Class/Status: Standard, valid
Released: 2011-11
VDE Art. No.: 0113033

Contents (only German)

This part of DIN EN 60204 (VDE 0113) applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current and not exceeding 1 500 V for direct current, and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.