Cover IEC 62374:2007
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IEC 62374:2007

Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

Circulation Date: 2007-03
Edition: 1.0
Language: EN-FR - bilingual english/french
Seitenzahl: 43 VDE Artno.: 213394

Content

Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure