1
Kinetic Energy Harvesting in a driven Tool Holder
Authors:
Wendt, Thomas; Gawron, Philipp; Stiglmeier, Lukas
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
2
Lab-on-a-chip based silicon nanowire sensor system for the precise study of chemical reaction-diffusion networks
Authors:
Tintelott, Marcel; Ingebrandt, Sven; Pachauri, Vivek; Vu, Xuan Thang
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
3
Large area energy filter membranes for effective doping of silicon and silicon-carbide substrates through high-energy implantation
Authors:
Steinbach, Tamas; Akhmadaliev, Shavkat; Burghartz, Joachim N.; Csato, Constantin; Gerold, Marcel; Koch, Robert; Krippendorf, Florian; Letzkus, Florian; Rueb, Michael
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
4
Large deflection of electrostatically actuated microbeams – How do the bending modes contribute beyond pull-in?
Authors:
Melnikov, Anton; Schenk, Hermann A. G.; Monsalve, Jorge M.; Wall, Franziska; Stolz, Michael; Mrosk, Andreas; Langa, Sergiu; Schuffenhauer, David; Gaudet, Matthieu; Kaiser, Bert
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
5
Laser Grooving – the „Swiss Army Knife“ to make the Best of a Wafer
Authors:
Gang, Andreas; Yubira, Yasuyoshi; Chervenkov, Sotir; Viehweger, Kay; Wolf, Juergen
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
6
Laserdirektschreiben metallischer Nanostrukturen aus der Gasphase mittels Zwei-Photonen-Absorption
Authors:
Schwarz, Nicolai; Klotzbuecher, Thomas
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
7
LIFT printing of deterministic porous electrodes for electrochemical systems
Authors:
Tang, Bo; Schneemann, Christian; Rager, Korbinian; Dworzak, Alexandra; Oezaslan, Mehtap; Dietzel, Andreas
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
8
Low-Cost Fabrication of Micro Elastofluidic Systems with Integrated 3D-Shaped Electrodes for Particle-Based Separation Processes
Authors:
Philippin, Nadine; Frey, Alexander; Kuehne, Ingo
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
9
Low-Redundancy Realization of Safety-Critical Automotive Functions
Authors:
Barner, Simon; Matthes, Stefan; Dormann, Holger; Schingale, Angelika; Kaulfersch, Eberhard; Eichhorst, Michael; Scheiter, Lutz; Schmidt, Holger; Gebert, Juergen
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
10
Machine Learning for Mathematical Modelling of Piezo Hysteresis
Authors:
Buechi, Roland
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
11
Magnetically Enhanced Stretchable Interconnects for Human-Machine Interface
Authors:
Ernst, Daniel; Nieweglowski, Krzysztof; Schubert, Martin; Bock, Karlheinz
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
12
Magnetoresistive Sensoren für die patientennahe Labordiagnostik
Authors:
Hölzl, Joachim; Slatter, Rolf
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
13
Maskless Lithography and 3D Printing through photochemical C,H Insertion Crosslinking
Authors:
Song, Dan; Kotz-Helmer, Frederik; Rapp, Bastian E.; Rühe, Juergen
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
14
Maskless pattern transfer into photostructured glasses by deep plasma etching
Authors:
Weigel, Christoph; Brokmann, Ulrike; Raedlein, Edda; Strehle, Steffen
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
15
Mechanical cooling of AFM cantilevers
Authors:
Ignat, Ioan; Schuster, Bernhard; Hafner, Jonas; Kwon, MnHee; Platz, Daniel; Schmid, Ulrich
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
16
Mechanischer 3-Bit Digital-Analog-Wandler (DAC) mit großem Stellweg
Authors:
Schmitt, Lisa; Schmitt, Philip; Hoffmann, Martin
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
17
MEMS for characterization of thermal conductivity in thin films and two-dimensional materials
Authors:
Jiang, Felix; Ryu, Meguya; Morikawa, Junko; Pachauri, Vivek; Ingebrandt, Sven; Vu, Xuan Thang
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
18
MEMS Speaker Modeling
Authors:
Clerici, Andrea Rusconi
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
19
MEMS tools with laser diodes as integrated light sources for chronic optical stimulation of neuronal activity in brain tissue
Authors:
Sharma, Kirti; Kutsch, Anna; Paul, Oliver; Ruther, Patrick
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
20
Microfabricated 2D array of ion traps
Authors:
Dietl, Matthias; Auchter, Silke; Milow, Ida; Roessler, Clemens; Blank, Oliver; Valentini, Marco; Holz, Philip; Schindler, Philipp; Monz, Thomas; Blatt, Rainer
Conference:
MikroSystemTechnik Kongress 2021 - Kongress