VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik (GMM) (Ed.)

GMM-Fb. 98: ACTUATOR 2021,

International Conference and Exhibition on New Actuator Systems and Applications GMM Conference, February 17-19, 2021, Online Event

GMM-Fachberichte

2021, 453 pages, 140 x 124 mm, Slimlinebox, CD-Rom
ISBN 978-3-8007-5454-0, e-book: ISBN 978-3-8007-5456-4
Personal VDE Members are entitled to a 10% discount on this title

Content Foreword

Attracting about 400 participants from more than 20 countries, the 17th International Conference on New Actuator Systems and Applications is the most important market place to meet leading international specialists, to share their expertise and to start business cooperations in the field of new actuator technologies. ACTUATOR has been the key forum for actuators based on smart materials and micro technologies as well as their applications in all areas of engineering for thirty years now. Over the years a huge variety of excellent ideas and results has been reported. A lot of them have been raised from vision to mass product. Among the success stories you will find quite a number of established applications of new actuators, in particular their well-known use in fuel injection, adaptive shock absorbers, nanopositioning, precision engineering like camera lenses and other applications of miniaturized drives. In this way, ACTUATOR has launched the realization of new product generations with outstanding compactness and high performance properties which so far have not been achieved in conventional technologies. A small wonder that based on this ignition, resulting in gaining access to new markets.
VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik (GMM)
Die GMM hat die Aufgabe, die wissenschaftliche und technische Entwicklung im Bereich der Mikroelektronik, Mikrosystem-, Nano- und Feinwerktechnik sowie deren breite Anwendungen zu fördern. Sie initiiert den dazu erforderlichen Dialog zwischen Herstellern, Anwendern und Wissen-schaft und bildet ein Forum für Diskussionen über diese Techniken in der Öffentlichkeit. Die GMM vertritt die Belange der in ihr vertretenen Arbeits- und Fachgebiete gegenüber politischen Ent-scheidungsträgern und bringt ihre Fachkompetenz in die Gestaltung der Förderpolitik ein.

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Electromagnetic Actuators

Authors:
Stroehla, Tom; Dahlmann, Martin; Sattel, Thomas

4

Piezoelectric Active Spherical Shell Reflector for Space

Authors:
Wang, Kainan; Alaluf, David; Godfroid, Thomas; Robert, Damien; Rodrigues, Goncalo; Preumont, Andre

5

Uniaxial Stress and Temperature Resilience of HPZ Piezoelectric Actuators

Authors:
Comyn, Tim; Cowin, Peter; Bell, Andrew J.

6

High Power Synthetic Jet Actuator

Authors:
Aigouy, Gerald; Betsch, Etienne; Claeyssen, Frank; Jaussaud, Gladys; Dandois, Julien; Eglinger, Emmanuel; Gallas, Quentin; More, Pierre; Ternoy, Frederic

7

Extremum seeking control of preload-controllable ultrasonic motor

Authors:
Mustafa, Abdullah; Morita, Takeshi

8

Generating Homogeneous Gas Mixtures by Using Acoustic Waves

Authors:
Krempel, Sandro; Seidel, Nico; Tietze, Sabrina; Drese, Klaus S.

9

Controller design for the Vector Control of Piezoelectric transducers

Authors:
Kaci, Anis; Giraud, Frederic; Giraud-Audine, Christophe; Amberg, Michel; Lemaire-Semail, Betty

10

MSPA motors for rotary motions

Authors:
Stentz, Jonathan; Pages, Alexandre; Gauthier, Jolan; Bencheikh, N.; Fournier, M.; Claeyssen, Frank

11

Gimbal mechanism design based on piezoelectric motors

Authors:
Pascual, Alvaro; Rivera, Cayetano; Ines, Javier; Collado, Marcelo

12

Dual Source Dual Frequency Drive and Modeling of Resonance type Piezoelectric Motors

Authors:
Koc, Burhanettin; Von Deyn, Lennart; Delibas, Buelent

13

Ship Propulsion by Means of Acoustic Radiation

Authors:
Backer, Alexander; Krempel, Sandro; Ritter, Frank; Tietze, Sabrina; Drese, Klaus S.

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15

Phase difference torque control of USM for walking assist system

Authors:
Sasamura, Tatsuki; Takamitsu, Kaneko; Mustafa, Abdullah; Orino, Yuichiro; Hachisuka, Satori; Morita, Takeshi

16

Core-shell droplet generation device using a flexural vibration by a bolt-clamped Langevin type ultrasonic transducer

Authors:
Omori, Kentaro; Fujimoto, Nozomu; Kanda, Takefumi; Wakimoto, Shuichi; Seno, Norihisa

17

Efficient Simulation Model of a Circular Piezoelectric Actuator with TDNNS Elements in Netgen/NGSolve

Authors:
Reininger, Alexander; Grasboeck, Lukas; Reischl, Daniel; Meindlhumer, Martin; Pechstein, Astrid; Lechleitner, Thomas

18

Flat Small Size Piezoelectric Actuator Operating in Several Modes

Authors:
Mazeika, Dalius; Ceponis, Andrius; Vasiljev, Piotr; Borodinas, Sergejus; Bareikis, Regimantas; Jurenas, Vytautas; Ostasevicius, Vytautas; Kulvietis, Genadijus

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21

22

Energy Harvesting System by Piezoelectric Power Generation using Mechanical-acoustic Coupling

Authors:
Tsuchiya, Mika; Tsuchiya, Hirotarou; Adachi, Tomomi; Moriyama, Hiroyuki; Uchida, Helmut Takahiro; Iwamori, Satoru

23

Concentric muscles – Miniature Pneumatic Actuator with Integrated Channel for Surgical Instruments

Authors:
Legrand, Juliea; Ourak, Moulouda; Vander Poorten, Emmanuela Benjamin

24

Posture Control of Hand Using Multi-balloon Actuator

Authors:
Koyanagi, Kenʼichi; Murabayashi, Tomoaki; Oshima, Toru; Kagechika, Kenji; Tamamoto, Takumi

25

Robust Silicon Micropump of Chip Size 5x5x0.6 mm3 with 4 ml/min Air and 0.5 ml/min Water Flow Rate for Medical and Consumer Applications

Authors:
Leistner, Henry; Wackerle, Martin; Congar, Yuecel; Anheuer, Daniel; Roehl, Siegfried; Richter, Martin

26

Titanium Micro Diaphragm Pump forImplantable Medical Applications

Authors:
Durasiewicz, Claudia; Bussmann, Agnes; Kibler, Sebastian

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28

Comparison of smart artificial muscles with different functional fibers

Authors:
Wakimoto, Shuichi; Kogawa, Sota; Matsuda, Hiroaki; Nagaoka, Kazuya; Kanda, Takefumi

29

Rendering Large-Area Deformable Tissue Haptics through Robotic Encountering Technology

Authors:
Portoles-Diez, Sergio; Vander Poorten, Emmanuel Benjamin; Reynaerts, Dominiek; Yokokohji, Yasuyoshi

30

Electromagnetic tuneable haptic feedback for HMI devices

Authors:
Quesada, Javier Ríos; Utegenova, Shinara

31

Twisted String Actuation for an Active Modular Hand Orthosis

Authors:
Muehlbauer, Pia; Schimbera, Mario; Stewart, Kent; Pott, Peter P.

32

Energy Harvesting in and on the Human Body

Authors:
Scheidl, Ailinn; Pott, Peter P.

33

Monolithic joints and linkages for low-cost microscopy

Authors:
Tichopad, Christian; Pott, Peter P.

34

SMA thick wires for fast actuation

Authors:
Citro, Marco; Coco, Salvatore

35

Alternating Current Activation of SMAWires

Authors:
Gorges, Tom; Seelecke, Stefan; Motzki, Paul

36

Self-locking SMA Actuator for Optical Zoom in Smartphones

Authors:
Honold, Michael; Bobic, Neven; Koepfer, Markus; Kazi, Arif

37

SMA actuators made from continuously rolled sheets

Authors:
Castillo, Charles C.; Knoll, Stefan

38

Bending actuators based on SMA wires – designed for easy integration

Authors:
Huebler, Moritz; Hammann, Nicola; Neblung, Nils; Kaiser, Max

39

Evolution of a resettable Hold-Down and Release Actuator Based on SMA Technology

Authors:
Collado, Marcelo; Rivera, Cayetano; Ines, Javier

40

Design of complex NiTi dampers trough subtractive and additive production processes: three case studies

Authors:
Nespoli, Adelaide; Bassani, Enrico; Grande, Antonio Mattia; Bettini, Paolo; Villa, Elena; Passaretti, Francesca

41

Numerical and experimental analysis of the discrete workspace of a prestressed planar mechanism driven by six SMA wires

Authors:
Boufayed, Rym; Chapelle, Frederic; Destrebecq, Jean-Francois; Balandraud, Xavier

42

Multistable proportional valve: An energy efficient approach for high temperature passive magnetic shape memory applications

Authors:
Happel, Julius; Pagounis, Emmanouel; Schnetzler, Rene; Heider, Jonas; Laufenberg, Markus

43

Effects of abnormal grain growth on shape memory characteristics of Cu-Al-Mn alloys

Authors:
Schelnberger, Benjamin; Roj, Robin; Theiss, Ralf; Dueltgen, Peter

44

Development of a Bistable SMA Actuated Industrial Gripper Based on a Compliant Design

Authors:
Scholtes, Dominik; Seelecke, Stefan; Motzki, Paul

45

Surface Shape Control Using a Shape Memory Actuator

Authors:
Berhil, Ali; Bernard, Yves; Daniel, Laurent

46

Development of an SMA based End-effector Prototype for Material Handling in Manufacturing Processes

Authors:
Zimmer, Lukas; Welsch, Felix; Kirsch, Susanne-Marie; Rizzello, Gianluca; Seelecke, Stefan; Motzki, Paul

47

Model-Based, Self-Sensing Actuator System based on antagonistic SMA Wires

Authors:
Prechtl, Johannes; Seelecke, Stefan; Motzki, Paul; Rizzello, Gianluca

48

Hybrid dynamical model for elastocaloric heating and cooling device based on Shape Memory Alloy wires

Authors:
Mandolino, Michele Arcangelo; Welsch, Felix; Kirsch, Susanne-Marie; Michaelis, Nicolas; Schuetze, Andreas; Seelecke, Stefan; Motzki, Paul; Rizzello, Gianluca

49

Active Vibration Damping and Control using SMA Foil-based Devices

Authors:
Jacob, Kiran; Sessner, Vincent; Miyazaki, Shuichi; Kohl, Manfred

50

Modelling the Stress-dependent Hysteresis of Shape Memory Alloys

Authors:
Kazi, Arif; Frenzel, Philip; Bobic, Neven

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52

New Separation Processes for Fabrication of Magnetic Shape Memory Actuator Elements

Authors:
Boehm, Andrea; Meichsner, Gunnar; Schneider, Joerg; Drossel, Welf-Guntram

53

A Combined Magneto-Mechanical Characterization Procedure for Magnetic Shape Memory Alloys

Authors:
Ehle, Fabian; Neumeister, Peter; Haufe, Eric; Neubert, Holger

54

Experimental Investigation of an MSM controlled Reluctance Actuator

Authors:
Hutter, Marco; Kazi, Arif; Gundelsweiler, Bernd

55

High force density actuators with inherent safety

Authors:
Zoels, Wolfgang; Bachmaier, Georg; McClanahan, Christopher

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Effects of hydrogen treatment and substrate hardness on the negative magnetostrictive thin films and their coatings

Authors:
Tokiwa, Ren; Nakahiro, Shuntaro; Ono, Seo; Kamiya, Masato; Gemma, Ryota; Matsumura, Yoshihito; Uchida, Helmut Takahiro

58

Stepwise Electrostatic Actuator System for THz Reflect Arrays

Authors:
Schmitt, Lisa; Schmitt, Philip; Barowski, Jan; Hoffmann, Martin

59

Interfacial adhesion evaluation of magnetostrictive thin films applying electrochemical hydrogen loading technique

Authors:
Ono, Seo; Tokiwa, Ren; Matsumura, Yoshihito; Uchida, Helmut Takahiro

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61

Effect of in-situ substrate biases changes and ex-situ hydrogen loading on in-plane stress in Sm-Fe thin films

Authors:
Kamiya, Masato; Yamaguchi, Kengo; Kataoka, Ryuichi; Tokiwa, Ren; Ono, Seo; Uchida, Helmut Takahiro; Gemma, Ryota; Matsumura, Yoshihito

62

Effect of hydrogen solution on the Young’s modulus of Nickel

Authors:
Matsumoto, Mutsuki; Yamane, Ryoya; Tokiwa, Ren; Odaka, Hironori; Adachi, Tomomi; Kaneko, Arata; Takimoto, Toshikio; Tonegawa, Akira; Tsuchiya, Hirotarou; Uchida, Helmut Takahiro

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Effect of hydrogen solution on the Young’s modulus of rolled tungsten

Authors:
Yamane, Ryoya; Tokiwa, Ren; Kaneko, Arata; Takimoto, Toshikio; Adachi, Tomomi; Tsuchiya, Hirotarou; Tonegawa, Akira; Uchida, Helmut Takahiro

65

Piezoelectric motor operated both in resonance and DC modes

Authors:
Wischnewski, Maxim; Delibas, Buelent; Wischnewski, Alexej

66

Miniaturized electric linear drive with permanent magnetic weight compensation

Authors:
Schulte Westhoff, Bela; Masoud, Abd Elkarim; Maas, Juergen

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Individually Tunable Array of Micro Fresnel Mirrors

Authors:
Bruno, Binal Poyyathuruthy; Schuetze, Robert; Wallrabe, Ulrike

70

Low-scale HV Amplifier for driving thin-film DE Transducers

Authors:
Junglasa, Samuel; Maas, Juergen

71

Flatness-based Control for Dielectric Elastomer Transducers

Authors:
Masoud, Abd Elkarim; Hubracht, Andreas; Junglas, Samuel; Maas, Juergen

72

Training and Modelling the Non-Linear Behavior of an MR Brake by Using RNN and LSTM

Authors:
Karabulut, Mehmet Goerkem; Kuecuekoglu, Sefa Furkan; Dede, Mehmet Ismet Can

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74

Zero Boil Off Compressor Based on MICA Actuators

Authors:
Aigouy, Gerald; Rowe, Steven; Meneroud, Patrick; Claeyssen, Frank; Pouvesle, Nicolas; Strauss, Bernhard; Nil, Celen; Isselhorst, Armin; Branco, Moritz; Persson, Jan

75

Permanent magnet linear actuator: non-linear causal modelling

Authors:
Lauzier, Kevin; Bribiesca-Argomedo, Federico; Gauthier, Jean-Yves; Sesmat, Sylvie; Lin-Shi, Xuefang; Lopes, Diogo Carvalho

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Large stroke Rotary Voice Coil Motor for cryogenic application

Authors:
Bencheikh, Nabil; Aigouy, Gerald; Claeyssen, Frank

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Actuation with Magnetoactive Polymers

Authors:
Boese, Holger; Ehrlich, Johannes; Gerlach, Thomas

79

Self-Sensing Electroadhesive Polymer Gripper with Magnetically Controllable Surface Geometry

Authors:
Sindersberger, Dirk; Prem, Nina; Monkman, Gareth John; Zimmermann, Klaus

80

Electromechanical characterization and laser structuring of Ni-based sputtered metallic compliant electrodes for DE applications

Authors:
Hubertus, Jonas; Croce, Sipontina; Neu, Julian; Rizzello, Gianluca; Seelecke, Stefan; Schultes, Guenter

81

Modelling and characterization of a Soft Inverse Pneumatic Artificial Muscle

Authors:
Lorenzon, Lucrezia; Zrinscak, Debora; Maselli, Martina; Cianchetti, Matteo

82

Study of Gyro Monorail Production

Authors:
Amatani, Satoshi; Tsuchiya, Hirotarou; Okuyama, Atsushi; Uchida, Helmut Takahiro

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84

Effect of Actuation Signal on Single Stroke Volume in Metal Micro Diaphragm Pumps

Authors:
Thalhofer, Thomas; Bussmann, Agnes; Durasiewicz, Claudia; Hayden, Oliver

85

Adaptive Beams with Integrated Thermal Actuator

Authors:
Burghardt, Timon; Kelleter, Christian; Bosch, Matthias; Bachmann, Matthias; Binz, Hansgeorg; Blandini, Lucio; Sobek, Werner

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Concept and Fabrication of Silicone-based Rolled Dielectric Elastomer Actuators (RDEAs) for Soft Robots

Authors:
Kunze, Julian; Prechtl, Johannes; Bruch, Daniel; Nalbach, Sophie; Motzki, Paul; Seelecke, Stefan; Rizzello, Gianluca

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89

Influence of electrode design on actuation characteristics of cooperative DEAP actuators

Authors:
Zhu, Rui; Wallrabe, Ulrike; Woias, Peter; Wapler, Matthias C.; Mescheder, Ulrich

90

Soft Robotic Module Actuated by Silicone-Based Rolled Dielectric Elastomer Actuators - Modeling and Simulation

Authors:
Prechtl, Johannes; Kunze, Julian; Seelecke, Stefan; Rizzello, Gianluca

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92

Landing Efficiency of Aircraft Landing Gear System with MR Dampers

Authors:
Kang, Byung-Hyuk; Choi, Seung-Bok

93

Magnetorheological Yaw Damper with Short Response Time for Rail-way Vehicle Bogie

Authors:
Kubík, Michal; Strecker, Zbynek; Jenis, Filip; Machacek, Ondrej; Prikryl, Matej; Spalek, Petr

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95

Impact of Material Properties on the Dynamics of MR Dampers

Authors:
Trebacz, Paweł; Goldasz, Janusz; Sapinski, Bogdan

96

Parallel Field Segmentation Concept in ER/MR Dampers for a simpler Control System

Authors:
Tan, Aditya Suryadi; Sattel, Thomas; Radler, Oliver

97

FPSA & BSMA: Nanometric positioning actuators for ground and space applications

Authors:
Barillot, Francois; Rebufa, Jocelyn; Stentz, Jonathan; Guignabert, Adrien; Claeyssen, Frank

98

Magnetically actuated Fast Steering Mirrors

Authors:
Claeyssen, Frank; Aigouy, Gerald; De Lepine, Xavier; Cote, Clement; Rebufa, Jocelyn; Fournier, Marc; Duc, Sylvain; Sosnicki, Olivier; Betsch, Etienne; Guignabert, Adrien; Personnat, Pierre

99

Modeling and Experiments of Additively-Manufactured Fluid Actuated Morphing Unit Structures

Authors:
Vasista, Srinivas; Buechner, Kathrin; Titze, Maik; Riemenschneider, Johannes; Monner, Hans Peter; Seitz, Vera

100

Slipring rotor made by Additive Manufacturing: redesign, manufacturing and validation testing for space applications

Authors:
Kiener, Lionel; Saudan, Herve; Novo, David; Lani, Sebastien; Bernard, Gaetan; Miler, Mickael; Bilbeau, Damien

101

Measurement by vibrating reed method of Young’s modules of Carbon fiber reinforced plastics

Authors:
Miura, Eiichi; Takeda, Keisuke; Adachi, Tomomi; Kimura, Hideki; Nishi, Yoshitake; Uchida, Helmut Takahiro

102

The Influence of Boundary Condition and Collision Position on the Elastic Collision of Bar and Beam

Authors:
Tsuchiya, Hirotarou; Yamane, Ryoya; Narabayashi, Tatsuo; Uchida, Helmut Takahiro

103

Road Noise Reduction inside car cabin using Active Structural Acoustic Control (ASAC)

Authors:
Hariri, Hassan; Masson, Patrice; Frechette, Luc

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105

Compact 3D-printed z-positioning unit for high-throughput microscopy

Authors:
Weiland, Sophie; Schaefer, Max B.; Stewart, Kent W.; Pott, Peter P.

106

IRESA - Intelligent Redundant Spacecraft Actuator, Generation II

Authors:
Roj, Robin; Theiss, Ralf; Dueltgen, Peter; Schummer, Florian

107

A Consistent View on Cooperative Multistage Electrostatic Actuation

Authors:
Conrad, Peter; Hoffmann, Martin

108

Development of Co-Integrated Shape Memory Actuators for Silicon Micro- and Nanomechanics

Authors:
Li, Zixiong; Arivanandhan, Gowtham; Rastjoo, Sanaz; Fechner, Randy; Kohl, Manfred; Bumke, Lars; Quandt, Eckhard

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110

Design and characterization of polymeric domes as biasing elements for dielectric elastomer membrane actuators

Authors:
Neu, Julian; Croce, Sipontina; Hubertus, Jonas; Rizzello, Gianluca; Schultes, Guenter; Seelecke, Stefan

111

Modeling and simulation of compliant biasing systems for dielectric elastomer membranes based on polymeric domes

Authors:
Croce, Sipontina; Neu, Julian; Hubertus, Jonas; Rizzello, Gianluca; Seelecke, Stefan; Schultes, Guenter

112