Autoren:
Foray, Jean Marie; Dejaune, Patrice; Sergent, Pierre; Gough, Stuart; Davene, Magali; Favre, Arnaud; Rude, C.; Trautmann, T.; Tissier, Michel; Cheung, D.; Fontaine, H.; Veillerot, M.; Avary, K.; Hollein, I.; Lerit, R.
Konferenz:
EMLC 2008 - 24th European Mask and Lithography Conference