IEC 60050-523:2018
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
                                
                                    Ausgabedatum:
                                    2018-12
                                    Edition:
                                        1.0
                                        
                                    Sprache: EN-FR - zweisprachig englisch/französisch
                                    Seitenzahl: 47                                    VDE-Artnr.: 226126
                                
                            
                                                                            IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
It has the status of a horizontal standard in accordance with IEC Guide 108.                                                                    


