IEC TS 62876-3-2:2026
Nanomanufacturing - Reliability and durability assessment - Part 3-2: Graphene - Ellipsometry measurement of graphene
Ausgabedatum:
2026-04
Edition:
1.0
Sprache: EN - englisch
Seitenzahl: 18 VDE-Artnr.: 256113
IEC TS 62876-3-2:2026 which is a Technical Specification, establishes a standardized method to determine
• volume fraction
for graphene by
• ellipsometry.
Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non-destructive, it can be used to assess the reliability and durability of graphene films on production lines.
• For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated.
• Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed.
• This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.