IEC 62047-4:2008Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
115,00 €
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IEC 62047-2:2006Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
80,00 €
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IEC 62047-3:2006Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
20,00 €
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