Integrated Silicon Antennae for Operation at 80 GHz

Konferenz: GeMIC 2008 - German Microwave Conference
10.03.2008 - 12.03.2008 in Hamburg-Harburg, Germany

Tagungsband: GeMIC 2008

Seiten: 4Sprache: EnglischTyp: PDF

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Morschbach, M.; Xu, H.; Spiessberger, S.; Kasper, E. (NN)

In this paper we present different types of antennae operating at 80 and 85 GHz. Layout procedure, fabrication technology and first measurement results of an integrated antennae on high resistivity (HR) silicon (Si) substrate will be shown. With the promising results of this research, we suggest fully integrated Si single chip radar using high resistivity substrates, a so-called SIMMWIC.