Selective deposition of aligned carbon nanotubes for NEMS applications

Inhalt:
In this work we demonstrate a scalable approach for aligned deposition of SWCNT arrays with the AC-dielectrophoresis technique at room temperature. For that purpose we developed a special experimental setup where removable microfluidic channels are applied to guarantee definite and reproducible deposition parameters. Dispersions with highly purified Arc-SWCNTs and sodium dodecylsulfate (SDS) as dispersing agent were prepared. Electrode structures with different geometrics were fabricated and deposition of CNTs under variation of dispersion- and AC-field-parameters was performed. Furthermore we emphasized on the removal of dispersing residuals after deposition. SEM studies showed very homogeneous, selective and aligned CNT deposition between the electrodes. I-V measurements verify good and reliable contacts with comparatively low resistances.