Platform for lab-on-a-chip systems based on integrated active valves made in polymers suitable for mass production

Konferenz: MikroSystemTechnik - KONGRESS 2009
12.10.2009 - 14.10.2009 in Berlin, Germany

Tagungsband: MikroSystemTechnik

Seiten: 4Sprache: EnglischTyp: PDF

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Rupp, J.; Schmidt, M.; Günther, B.; Stumber, M.; Rothacher, P.; Daub, M. (Robert Bosch GmbH, Corporate Sector Research Microsystem Technologies, Robert Bosch Platz 1, 70839 Gerlingen, Germany)
Zengerle, R. (Laboratory for MEMS Applications, Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Koehler-Allee 106, 79110 Freiburg, Germany)

For the first time we present integrated pneumatically controllable valves realized with three layers consisting of two injection compression molded parts separated by a 25 µm thin elastic TPE (thermoplastic elastomer) membrane welded together in one step. The device shows excellent response time and sealing quality at a very low sealing pressure. The production technologies injection compression molding and laser welding fulfill the requirements of a high throughput production and have the potential to manufacture cheap and reliable lab on a chip systems. The elastic TPE membrane works as a joining layer between the two outer layers, each made of cycloolefinpolymere (COP), cycloolefincopolymere (COC) or polycarbonate (PC). Valving is realized by applying pressure in a displacement chamber above a microfluidic channel and deforming the elastic membrane. The materials used show a high chemical resistance against a broad range of commonly used liquids [1]. This consistent technological approach represents a flexible platform for muTAS applications with the active valve as a basic element for more complex applications, such as pumping and mixing on chip.