Nanomembranes – a link between MEMS and NEMS

Konferenz: MikroSystemTechnik - KONGRESS 2009
12.10.2009 - 14.10.2009 in Berlin, Germany

Tagungsband: MikroSystemTechnik

Seiten: 4Sprache: EnglischTyp: PDF

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Matovic, Jovan; Adamovic, Nadja; Schmidt, Ulrich (Institute of Sensor and Actuator Systems,Vienna University of Technology, Vienna, Austria)
Jakšic, Zoran (Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia)

This paper presents some properties of nanomembranes (i.e. nanometer-thin, freestanding, self-supported planar structures) as well as some of their applications in various MEMS devices. Nanomembranes belong both to the nanostructures (due to their thickness which is in the range 1 to 100 nm) and to the MEMS (due to the areas which may be up to a few millimeter square, even a centimeter square). The integration of the nanomembranes into MEMS devices open a wide area of novel possibilities, not available with traditional MEMS membranes.