Robustness Validation for MEMS

Konferenz: MikroSystemTechnik - KONGRESS 2009
12.10.2009 - 14.10.2009 in Berlin, Germany

Tagungsband: MikroSystemTechnik

Seiten: 3Sprache: EnglischTyp: PDF

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Jäger, B.; Kanert, W. (Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg)

Robustness Validation (RV) is a valuable failure-mechanism-driven approach to product reliability and qualification, which relates real application conditions to test conditions. However, the application of Robustness Validation as described in the RV handbook to MEMS meets with difficulties connected to the special characteristics of such devices. These difficulties are discussed in the paper.