A novel mass sensitive sensor

Konferenz: MikroSystemTechnik - KONGRESS 2011
10.10.2011 - 12.10.2011 in Darmstadt, Deutschland

Tagungsband: MikroSystemTechnik

Seiten: 4Sprache: EnglischTyp: PDF

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Goehlich, A.; Jonville, C.; Klieber, R.; Mao, X.; Martens, K.; Jansen, T.; Trieu, H. K.; Vogt, H. (Fraunhofer Institut für Mikroelektronische Schaltungen und Systeme, Finkenstraße 61, 47057 Duisburg, Germany)

In this contribution we report on a novel sensor that has been developed within the framework of the Euregio Unihealth project. This project aims at the development of a marker free bio sensor that is intended for the detection of certain allergens, e.g. gluten. The adopted sensor principle relies on electrostatically driven resonating membrane structures with a functionalized surface that allows for the selective binding of allergens. The allergen binding causes an increase of the effective mass of the membrane and therefore induces a decrease of the mechanical resonance frequency. The sensor structure itself is realized with the aid of an existing capacitive pressure sensor technology. The performed measurements of the electrical spectra show non linear effects due to the electrostatic excitation mechanism. These effects are explained in terms of a nonlinear oscillator model.