Realization of nonlinear hardening springs with predefined characteristic for vibration transducers based on beam structures

Konferenz: MikroSystemTechnik - KONGRESS 2011
10.10.2011 - 12.10.2011 in Darmstadt, Deutschland

Tagungsband: MikroSystemTechnik

Seiten: 4Sprache: EnglischTyp: PDF

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Spreemann, D.; Folkmer, B.; Manoli, Y. (1HSG-IMIT - Institute of Micromachining and Information Technology, Villingen-Schwenningen, Germany)
Manoli, Y. (2Fritz Huettinger Chair of Microelectronics, Department of Microsystems Engineering - IMTEK, University of Freiburg, Freiburg, Germany)

This paper presents a realization approach of nonlinear hardening springs with predefined characteristic. In the first part of the paper transient simulations, based on measured vibration profiles of a car engine, are used to show that the output power can be increased by about 20% using nonlinear hardening springs. Afterwards the realization approach based on a cantilever beam clamped between two shaped blocks is introduced. With the shape of the blocks the nonlinearity can be defined. The approach can be applied to piezoelectric as well as electromagnetic vibration transducers. Static mechanic finite element analyses (FEA) calculations have been used to verify the results. Finally a spring element has successfully been fabricated.