Badilita, Vlad; Kratt, Kai; Wallrabe, Ulrike (Laboratory for Microactuators, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Köhler-Allee 102, 79110 Freiburg, Germany)
Fassbender, Birgit; Sakellariou, Dimitris (CEA Saclay, IRAMIS, SIS2M, 91191, Gif-sur-Yvette, France)
Korvink, Jan G. (Laboratory for Simulation, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany)
Korvink, Jan G. (Freiburg Institute for Advanced Studies - FRIAS, University of Freiburg, Albertstraße 19, 79104 Freiburg, Germany)
We report on a novel single-chip MEMS-integration of a resonant LC-circuit for wireless magic angle coil spinning (MACS) NMR. The chip consists of a wirebonded 3D microcoil, an interdigitated capacitor and a sample container. The LC-circuit resonates at 700 MHz for 1H spectroscopy in 16.4 T magnetic field. The microcoil is inductively coupled with the probe-coil of the spectrometer. We demonstrate the high sensitivity of the setup by detecting the NMR signal from 0.3 nl H2O in a mixture with deuterium oxide (0.1% H2O: 99.9% D2O), and obtain an SNR = 8.5 in one scan.