Research on the controlling technology of deliquescent action in polishing of KDP crystals based on deliquescent action
Konferenz: ICPT 2012 - International Conference on Planarization / CMP Technology
15.10.2012-17.10.2012 in Grenoble, France
Tagungsband: ICPT 2012
Seiten: 6Sprache: EnglischTyp: PDF
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Autoren:
Guo, Shaolong (State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
Zhang, Feihu; Zhang, Yong (School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China)
Inhalt:
Combined with the characteristics of polishing technology for KDP crystals based on deliquescent action, the controlling method of deliquescent action in polishing of KDP crystals based on deliquescent action is proposed. The performance requirements of polishing fluid in polishing of KDP crystals based on deliquescent action are given. According to these performance requirements, the main components of the polishing fluid are determined. Based on the controlling method of deliquescent action, the polishing experiments of KDP crystals were carried out, the experimental results have verified the validity of the controlling method of deliquescent action. Key words: KDP crystals, ultraprecision machining, deliquescent action, controlling technology