Flexible Flow Sensors – Packaging and Applications

Konferenz: Sensoren und Messsysteme 2014 - Beiträge der 17. ITG/GMA-Fachtagung
03.06.2014 - 04.06.2014 in Nürnberg, Deutschland

Tagungsband: Sensoren und Messsysteme 2014

Seiten: 5Sprache: EnglischTyp: PDF

Persönliche VDE-Mitglieder erhalten auf diesen Artikel 10% Rabatt

Dumstorff, Gerrit; Berganski, Robert; Brauns, Eike; Sturm, Hannes; Lang, Walter (Institute of Microsensors, -actuators, and -systems (IMSAS), Microsystems Center Bremen (MCB), University of Bremen, Bremen, Germany)

The following paper introduces athermal flow sensor based on a flexible substrate. Therefore, the commonly used 380 µm silicon substrate has been replaced by an 18 µm polyimide foil to obtain higher flexibility and adaptability for integration on nonplanar surfaces. To show the applicability of the developed concept, the flexible flowsensor has been integrated on an airfoil with the aim of a flow separation and reattachment detection.In an additional application, the flow sensor has beenattachedon the curved surface of a pipe to measure the flow rate inside.