3D: Defects and Reliability

Inhalt:
In this paper we will discuss different aspects of 3D technology and their influence on reliability. Starting with a short walk through the manufacturing of stacked 3D systems, we will have a look at defects from two different angles: manufacturing and thermal effects, which origin from both manufacturing and thermal cycling. The latter effects influence the reliability, because they cannot be measured using regular test procedures. Thus, the design flow needs to be adapted to include additional simulation steps and the manufacturing process requires further specifications that need to be observed.