Design and fabrication of a Thermoelectric Nanowire Characterization Platform (TNCP) for structural and thermoelectric investigation of single nanowires

Konferenz: MikroSystemTechnik 2015 - MikroSystemTechnik Kongress 2015
26.10.2015 - 28.10.2015 in Karlsruhe, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2015

Seiten: 3Sprache: DeutschTyp: PDF

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Moosavi, S. Hoda; Kröner, Michael; Woias, Peter (Laboratory for Design of Microsystems, Department of Microsystems Engineering – IMTEK, Freiburg, Germany)

We have developed a MEMS platform to enable the characterization of individual nanowires both from thermoelectric and structural aspects. The main features of the TNCP are the proper thermal isolation of the platform at the nanowires sites. Additionally it is equipped with 4-point measurement electrodes and micro heater structure to allow for electrical and thermal measurements. TEM compatibility is achieved through a transparent region directly below the suspended nanowire.