Transfer of Nanocrystalline Diamond Films Grown by Chemical Vapor Deposition for Sensors and Other Applications
Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland
Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration
Seiten: 4Sprache: EnglischTyp: PDFPersönliche VDE-Mitglieder erhalten auf diesen Artikel 10% Rabatt
Behroudj, A.; Strehle, S. (Ulm University, Institute of Electron Devices and Circuits, Ulm, Germany)
Nanocrystalline diamond films are a promising material, e.g. for sensor applications, based on their chemical and mechanical stability as well as their usability as capable electrochemical electrodes. The transfer of nanocrystalline diamond films became of interest, as the number of potential growth substrate materials being compatible with the harsh diamond film synthesis conditions i.e. high temperature and hydrogen radicals, is significantly limited. Here we present some strategies to transfer nanocrystalline diamond films from their growth substrate to another substrate comprising film growth on Si and Si3N4 as well as membrane fabrication.