ZnO nanorods-patterned piezoresistive Si cantilevers for humidity sensors

Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland

Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration

Seiten: 6Sprache: EnglischTyp: PDF

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Xu, Jiushuai; Wu, Wenze; Hamdana, Gerry; Bertke, Maik; Wasisto, Hutomo Suryo; Peiner, Erwin (TU Braunschweig, Department of Semiconductor Technology, Braunschweig, Germany & Laboratory for Emerging Nanometrology (LENA), Braunschweig, Germany)
Yang, Jingmei (TU Braunschweig, Department of Semiconductor Technology, Braunschweig, Germany)

The possibilities and properties of Zinc Oxide (ZnO) nanorods modified piezoresistive silicon cantilevers as humidity sensors have been investigated, and ZnO nanorods were deposited through the aqueous chemical growth (ACG) method. Secondout-of-plane bending mode of piezoresistive silicon microcantilevers with and without ZnO nanorods were measured under different relative humidity (RH) and temperature. Small hysteresis between increasing and decreasing humidity loading is observed as well as a temporal stability better than the fluctuations set by the climate chamber making the novel sensor highly attractive for wearable environmental monitoring applications.