Modeling and compensating thermal drift in time divergent AFM measurements

Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland

Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration

Seiten: 6Sprache: EnglischTyp: PDF

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Krauskopf, J. E.; Bartenwerfer, M.; Fatikow, S. (Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, 26129 Oldenburg, Germany)

Thermal drift is a problem in imaging with atomic force microscopes. In this work we present an extension of the well known gradient-based methods for optical flow calculation, developed by Horn & Schunk as well as Lucas & Kanade. We also analyse different trajectories and evaluate their suitability for use with the aforementioned methods. As part of this theoretical work, we are able to show that the methods by Horn & Schunk and Lucas & Kanade are extendable to the thermal drift problem. Furthermore, we compare different standard trajectories with a self-developed evaluation system and propose a favourable trajectory for drift estimation and compensation.