Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition

Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland

Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration

Seiten: 4Sprache: EnglischTyp: PDF

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Klauser, W.; Bartenwerfer, M.; Elfert, P.; Krauskopf, E.; Fatikow, S. (Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, 26129 Oldenburg, Germany)

This work combines the Electron Beam induced Deposition technique with a purposeful scanning pattern generation for the scanning electron microscope by means of a self-developed scan generator. This allows for deposition of nanogranular metal structures with specific geometries, which can be used as strain sensors on the nano- and microscale. Furthermore, the deposition process is combined with a vision-based automation sequence using a self-developed software framework for drift compensation.