Gas measurement system for indoor air quality monitoring using an integrated pre-concentrator gas sensor system

Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland

Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration

Seiten: 6Sprache: EnglischTyp: PDF

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Autoren:
Leidinger, Martin; Sauerwald, Tilman; Schuetze, Andreas (Universität des Saarlandes, Lehrstuhl für Messtechnik, Saarbrücken, Germany)
Reimringer, Wolfhard; Conrad, Thorsten (3S GmbH, Saarbrücken, Germany)
Alepee, Christine (SGX Sensortech SA, Corcelles, Switzerland)
Rieger, Max (Fraunhofer Institut für Chemische Technologie ICT, Pfinztal, Germany)

Inhalt:
A gas sensor system designed for indoor air quality monitoring is presented. The sensor component is an integrated MEMS device combining a (dual) gas sensor and a gas pre-concentrator in a single SMD package. The pre-concentrator is based on metal-organic framework materials, which have been shown to be suited for the task of gas pre-concentration. Several of these materials have been studied for their gas adsorption and desorption performance. Simulations of the integrated system show a significant increase of the gas concentration at the gas sensors during pre-concentrator desorption. Test measurements show the impact of the pre-concentrator on the gas sensor signal for permanent gases and volatile organic compounds. These devices were integrated into prototype field test gas sensor systems for testing their capabilities in the application of indoor air monitoring. The sensor systems feature the hardware and software needed to operate the pre-concentrator gas sensor devices in temperature cycled operation as well as record and process the resulting sensor signals.