High-precision thermal diode for single-point calibration and the calibration-free temperature measurement in the range from 3 K to 500 K
Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland
Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration
Seiten: 5Sprache: EnglischTyp: PDFPersönliche VDE-Mitglieder erhalten auf diesen Artikel 10% Rabatt
Tobehn, Ingo; Ortlepp, Thomas (CiS Research Institute for Micro Sensors GmbH, 99099 Erfurt, Germany)
Pause, Saskia (Technical University of Ilmenau, Inst. of Physics, 98693 Ilmenau, Germany)
Semiconductor diodes and transistors are small cheap, highly sensitive and almost linear temperature sensors. But there is always a manufacturing tolerance which prevents interchangeability without individual calibration. Therefore CiS manufactures diodes, which are optimized specifically for temperature measurement. Due to a suitable process development, combined with a targeted process control a reproducible sensitivity dU/dT and widest possible consistency with the ideal characteristic in a specific current range is achieved. Thus a reliable single-point calibration can be carried out and an alternative calibration-free temperature measurement is shown to be possible.