High-precision thermal diode for single-point calibration and the calibration-free temperature measurement in the range from 3 K to 500 K

Konferenz: Mikro-Nano-Integration - 6. GMM-Workshop
05.10.2016 - 06.10.2016 in Duisburg, Deutschland

Tagungsband: GMM-Fb. 86: Mikro-Nano-Integration

Seiten: 5Sprache: EnglischTyp: PDF

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Autoren:
Tobehn, Ingo; Ortlepp, Thomas (CiS Research Institute for Micro Sensors GmbH, 99099 Erfurt, Germany)
Pause, Saskia (Technical University of Ilmenau, Inst. of Physics, 98693 Ilmenau, Germany)

Inhalt:
Semiconductor diodes and transistors are small cheap, highly sensitive and almost linear temperature sensors. But there is always a manufacturing tolerance which prevents interchangeability without individual calibration. Therefore CiS manufactures diodes, which are optimized specifically for temperature measurement. Due to a suitable process development, combined with a targeted process control a reproducible sensitivity dU/dT and widest possible consistency with the ideal characteristic in a specific current range is achieved. Thus a reliable single-point calibration can be carried out and an alternative calibration-free temperature measurement is shown to be possible.