Measurement of Removal Force in DI-Water for Fine Particles with Sub-nanoNewton Resolution
Konferenz: ICPT 2017 - International Conference on Planarization/CMP Technology
11.10.2017 - 13.10.2017 in Leuven, Belgium
Tagungsband: ICPT 2017
Seiten: 6Sprache: EnglischTyp: PDF
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Autoren:
Shima, Shohei; Hamada, Satomi; Takatoh, Chikako; Wada, Yutaka; Fukunaga, Akira; Sobukawa, Hiroshi (Ebara Corporation, 4-2-1Honfujisawa, Fujisawa-shi 251-8502, Japan)
Inhalt:
We measured removal force in wet condition for fine particles of silica and polystyrene by using the friction mode of AFM. The removal force of both particles with 100nm in diameter adhered to TEOS substrate is in the range from 10 - 50 nN in atmospheric condition. When particles are dipped in DI-water, the removal force decreased down to about 1nN in the case of silica particles. The removal force of polystyrene particles in DI-water could be estimated in the range of sub-nanonewton, because of detachment from TEOS substrate was observed when dipped in DI-water. Measurement of removal force in the range of sub-nanonewton should be achieved by using cantilevers with torsion spring constant smaller than 5N/m. We consider that the detection limit of the removal force of fine particles with the torsion method could be sub-nanonewton range. Keywords: Cleaning, Particle, Removal force, In wet condition, AFM, Friction mode