Gas Density and Viscosity Measurement with a Microcantilever for Online Combustion Gas Monitoring

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For this study we combined different MEMS gas sensors into a multi sensor system including a highly sensitive micro cantilever, a thermal sensor, temperature and pressure sensors for online monitoring of thermophysical properties of low pressure gases, such as density, viscosity, thermal conductivity at process conditions with accuracies in the range of 1% to 2%. By using correlation models for specific groups of gas mixtures additional information of the gas sample can be deduced. We implemented and tested such specific correlation models for combustion gas mixtures (hydrogen enriched natural gas) for quantities like calorific value, Wobbe index, total inert gas content and hydrogen content.