MEMS-based Thermal Flow Sensor System for High Ambient Temperatures

Konferenz: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
26.06.2018 - 27.06.2018 in Nürnberg, Deutschland

Tagungsband: ITG-Fb. 281: Sensoren und Messsysteme

Seiten: 4Sprache: EnglischTyp: PDF

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Eichhorn, Ingo; Dumstorff, Gerrit; Lang, Walter (Institute for Microsensors, -actuators and -systems (IMSAS), University of Bremen, Bremen, Germany)

We present a MEMS (micro electro mechanical system) based thermo-electric flow measurement system operating at high ambient temperatures. Therefore, we developed a packaging based on high temperature stable materials, operating at ambient temperatures up to T=250deg C. The system is characterized at different ambient temperatures by considering the sensor system as both, a mass flow meter and a volume flow meter. In case of a mass flow meter, the characteristic curves differ only little, although the ambient temperatures change. The system shows good stability at T=200deg C during a first long-time test of 200 hours.