Comparison of various topography sensors by a multisensor measuring system

Konferenz: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
26.06.2018 - 27.06.2018 in Nürnberg, Deutschland

Tagungsband: ITG-Fb. 281: Sensoren und Messsysteme

Seiten: 4Sprache: EnglischTyp: PDF

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Hagemeier, Sebastian; Lehmann, Peter (Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Wilhelmshoeher Allee 71, 34121 Kassel, Germany)

For the measurement of surface topographies in the micro- and nanometer range a lot of different methods exist. Typical 3D sensors used in industry and science are atomic force microscopes, tactile stylus instruments, confocal microscopes and white light interferometers. In this contribution a multisensor measuring system will be presented. With this measurement system comparative measurements using five different topography sensors can be done in a single set-up. In addition to the concept of the multisensor measuring system, surface profiles obtained from a fine chirp calibration standard measured by various sensors are presented to show the difficulties of an exact reconstruction of the surface structure as well as the necessity of comparative measurements with different topography sensors.