Additive Manufacturing of Sensor Systems with Piezoresistive Read-Out

Konferenz: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
26.06.2018 - 27.06.2018 in Nürnberg, Deutschland

Tagungsband: ITG-Fb. 281: Sensoren und Messsysteme

Seiten: 4Sprache: EnglischTyp: PDF

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Gehlken, Wiebke; Hinz, Jennifer; Dumstorff, Gerrit; Lucklum, Frieder; Lang, Walter; Vellekoop, Michael (Institute for Microsensors, -actuators and -systems (IMSAS), University of Bremen, Bremen, Germany)

We present piezoresistive pressure and vibration sensors fabricated using additive manufacturing. We designed 3D models of millimetre-sized pressure chambers and cantilevers and printed them with a microstereolithographic printer using flexible and stiff plastic resins. As sensing elements, strain gauges are screen printed on the 3D parts and connected in a Wheatstone bridge. The results of the measurements are compared with analytical investigations and show good accordance.