CMOS Integrated Field Coils for Self-Calibration of 3D Hall-Sensors

Konferenz: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
26.06.2018 - 27.06.2018 in Nürnberg, Deutschland

Tagungsband: ITG-Fb. 281: Sensoren und Messsysteme

Seiten: 4Sprache: EnglischTyp: PDF

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Krause, Dennis; Stahl-Offergeld, Markus; Hohe, Hans-Peter (Fraunhofer Institute for Integrated Circuits IIS, Erlangen, Germany)
Sand, Markus (Ingenieurbüro Sand, Tännesberg, Germany)
Kovacs, Guenter (Aschaffenburg University of Applied Sciences, Aschaffenburg, Germany)

An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil’s magnetic flux density is less than 1%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0:2 mT.