CMOS Integrated Field Coils for Self-Calibration of 3D Hall-Sensors

Konferenz: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
26.06.2018 - 27.06.2018 in Nürnberg, Deutschland

Tagungsband: ITG-Fb. 281: Sensoren und Messsysteme

Seiten: 4Sprache: EnglischTyp: PDF

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Autoren:
Krause, Dennis; Stahl-Offergeld, Markus; Hohe, Hans-Peter (Fraunhofer Institute for Integrated Circuits IIS, Erlangen, Germany)
Sand, Markus (Ingenieurbüro Sand, Tännesberg, Germany)
Kovacs, Guenter (Aschaffenburg University of Applied Sciences, Aschaffenburg, Germany)

Inhalt:
An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil’s magnetic flux density is less than 1%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0:2 mT.