Analysis and Simulation of Super-Hydrophobic Layers for Microfluidic Applications

Konferenz: Mikro-Nano-Integration - 7. GMM-Workshop
22.10.2018 - 23.10.2018 in Dortmund, Deutschland

Tagungsband: GMM-Fb. 92: Mikro-Nano-Integration

Seiten: 5Sprache: EnglischTyp: PDF

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Tuerk, Semih; Viga, Reinhard (University of Duisburg-Essen, Duisburg, Germany)
Jupe, Andreas; Vogt, Holger (University of Duisburg-Essen, Duisburg, Germany & Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany)

In this work, super-hydrophobic coatings are investigated for drop transport with electrowetting-on-dielectric (EWOD). At first, the basics of EWOD are shown. Then the impact of decreasing the thickness of the dielectric layer and using super-hydrophobic coatings on the actuation voltage Vmin for drop transport is presented. In the last part, simulation results made with COMSOL MultiphysicsR are shown and the results are discussed.