Piezo-Actuated XYPhi-Motor based on Hemispherical Resonators

Inhalt:
Ultrasonic piezo motors are used in precision positioning systems, especially when a magnetic field-free drive solution is required. Their strength also lies in zero energy consumption at stand still. The operating principle is based on resonant vibration of a piezo resonator and results in elliptical or linear, inclined trajectories moving a friction contact. Usually, these piezo motors are guided in a linear direction. In order to achieve a XYPhi-stage, a perpendicular setup of two linear drives combined with a rotational stage is typically required. This sandwich-like stacked setup leads to disadvantages, like large installation spaces and unnecessarily moved masses. To create movements in X-Y- and φ-direction on a single level platform, a setup is presented that uses three piezo resonators, each generating a three-dimensional trajectory. The all-ceramic, hemispherical vault piezo resonators used [1] prove to be a suitable alternative to composite resonators due to low manufacturing and assembly costs. A controller setup to control the direction of the motor is shown.