Piezo-Actuated XYPhi-Motor based on Hemispherical Resonators

Konferenz: IKMT 2019 – Innovative Klein- und Mikroantriebstechnik - 12. ETG/GMM-Fachtagung
10.09.2019 - 11.09.2019 in Würzburg, Deutschland

Tagungsband: ETG-Fb 159: IKMT 2019

Seiten: 5Sprache: EnglischTyp: PDF

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Schiele, Frank; Gundelsweiler, Bernd; Schinkoethe, Wolfgang (Institute of Design and Production in Precision Engineering, University of Stuttgart, Germany)

Ultrasonic piezo motors are used in precision positioning systems, especially when a magnetic field-free drive solution is required. Their strength also lies in zero energy consumption at stand still. The operating principle is based on resonant vibration of a piezo resonator and results in elliptical or linear, inclined trajectories moving a friction contact. Usually, these piezo motors are guided in a linear direction. In order to achieve a XYPhi-stage, a perpendicular setup of two linear drives combined with a rotational stage is typically required. This sandwich-like stacked setup leads to disadvantages, like large installation spaces and unnecessarily moved masses. To create movements in X-Y- and φ-direction on a single level platform, a setup is presented that uses three piezo resonators, each generating a three-dimensional trajectory. The all-ceramic, hemispherical vault piezo resonators used [1] prove to be a suitable alternative to composite resonators due to low manufacturing and assembly costs. A controller setup to control the direction of the motor is shown.