NDIR Gas Measurement in Harsh Environments by Advanced Nanostructured IR Components and Packaging Technologies

Inhalt:
Based on the well-known optical NDIR gas measurement principle Micro-Hybrid developed an advanced gas sensor which withstands harsh environments like extraordinary moistures and high temperatures up to 200 °C. A field of application is controlling the CO2 atmosphere and the measurement of the humidity in serializable incubators. Core components of the developed gas sensor are highly effective and high temperature stable infrared emitter and detector MEMS chips based on nanostructured IR active surfaces. The precondition for long term stability is a real hermetic housing especially under these rough conditions. Common gluing technologies are not suitable for such terms. To achieve these requirements Micro-hybrid developed sophisticated packaging technologies for the IR-MEMS chips and the housing components which are appropriate for high temperature stable hermetic sealing.