Porous silicon based antireflection coating for the MWIR range
Konferenz: MikroSystemTechnik 2019 - Kongress
28.10.2019 - 30.10.2019 in Berlin, Deutschland
Tagungsband: MikroSystemTechnik Kongress 2019
Seiten: 4Sprache: EnglischTyp: PDF
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Autoren:
Keshavarzi, Shervin; Kovacs, Andras; Mescheder, Ulrich M. (Institute for Microsystems Technology (IMST), Department of Medical and Mechanical Engineering (MME), Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany)
Inhalt:
Due to its specific nanostructures and outstanding optical properties, porous silicon is emerging into Micro-Opto-Electro-Mechanical Systems (MOEMS) as optical components for a wide range of applications. Electro-optical/infrared sensors have been developed for a variety of defense and commercial applications. In these applications, high-quality nanostructured antireflective coatings can enhance the performance of such sensors. In this paper, we present a cost-effective multilayer porous silicon antireflective coating for the MWIR range, which can be simply integrated into electro-optical/in-frared sensors.