Carbon Nanomaterials for Miniaturized Gas Sensors

Konferenz: MikroSystemTechnik 2019 - Kongress
28.10.2019 - 30.10.2019 in Berlin, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2019

Seiten: 4Sprache: EnglischTyp: PDF

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Autoren:
Aumer, Fabian; Kroener, Anton (Universität Regensburg, 93040 Regensburg, Deutschland & Infineon Technologies AG, 85579 Neubiberg, Deutschland)
Hecht, Fabian (Infineon Technologies AG, 85579 Neubiberg, Deutschland)
Recum, Patrick; Hirsch, Thomas (Universität Regensburg, 93040 Regensburg, Deutschland)

Inhalt:
Nanomaterials are in the focus of research due to their outstanding chemical, physical and electrical properties. Society is also becoming more aware of air pollution and its negative effects due to numerous debates. As interest is growing to unite these two areas, the interest in materials for miniaturized gas sensors is growing as well. This is a key step to enable the later integration of gas sensors into portable electronics. Within the scope of this work, carbon nanomaterials prepared by a modified Hummers method were tested and compared for their suitability as sensor materials for miniaturized, lowpower consuming chemiresistive gas sensors. The graphene flakes have been characterized by optical flake size analysis, defects were compared using Raman spectroscopy and interpretations are given. Furthermore, the sensors response to NO2 was evaluated. The temperature dependence of the signal was investigated as well as calculations towards the power consumption were done. The results provide a comparison of the graphene-based materials and indicate their usefulness in low-power miniaturized gas sensing.