Vapor HF Etching Based Surface Micromachining Process for Fabricating a Micromechanical Sterilization Cycle Counter
Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland
Tagungsband: MikroSystemTechnik Kongress 2021
Seiten: 4Sprache: EnglischTyp: PDF
Vora, Riddhesh (Georg H. Endress Chair for Smart System Integration, Department of Microsystems Engineering – IMTEK, Albert-Ludwigs-University Freiburg, Freiburg, Germany)
Spies, Irina; Hoffmann, Daniel; Trautner, Heiko; Blattert, Christoph; Dehe, Alfons (Georg H. Endress Chair for Smart System Integration, Department of Microsystems Engineering – IMTEK, Albert-Ludwigs-University Freiburg, Freiburg, Germany & Hahn-Schickard, Villingen-Schwenningen, Germany)
It is mandatory for manufacturers of reusable medical devices to specify the maximum of allowed sterilization cycles. This work focuses on the fabrication of an autonomous sterilization cycle counter in MEMS technology. Surface microm-achining is applied utilizing vapor HF (vHF) etching and subsequent polymer anti-stiction coating as an efficient tech-nique to remove sacrificial buried oxide layers and to release micro structure without stiction. The vHF etching process has been optimized and reaches etch rates of 900 nm/min for the buried oxide with a uniformity of more than 95 % across a 100 mm wafer. Based on this process a compatible design with perforated structures is implemented. Finally, devices of the sterilization cycle counter are successfully tested by a simulated sterilization cycle temperature test.