Analysis of Inertial Sensor Frontend Inherent ESD Immunity

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 3Sprache: EnglischTyp: PDF

Elsobky, Mourad; Leube, Carsten; Alpert, Thomas; Mayer, Thomas (Robert Bosch GmbH, Reutlingen, Germany)

Precision readout electronics are essential for detecting the displacement of micromachined inertial sensors. In this paper, we present the effect of ESD (electrostatic discharge) protection circuit on the sensitivity of the sense front-end. In addition, the possibility of removing the primary ESD protection circuit and rely on the inherent protection of CMOS transmission gate (TG) switches is investigated.