Implementation of Fragile Holding Structures for Rotating Elements in the Printing Process of 2-Photon-Polymerization

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 4Sprache: EnglischTyp: PDF

Gehlken, Wiebke; Reede, Sina; Vellekoop, Michael J. (Institute for Microsensors, -actuators and -systems, University of Bremen, Germany & Microsystems Center Bremen (MCB), Germany)

In this paper the use of fragile holding structures for rotating elements in the printing process of 2-photon-polymerization is presented. These small holding structures are implemented in microrotors and enable an optimized printing process for freely movable structures. They prevent the elements from fusing together during the printing or development process and can be broken easily afterwards. Four holding structures with a predetermined breaking point placed between rotor and stator provide good stability during printing and developing and are easy to break at the same time. They can be broken contactless either by a nitrogen gun but also in a microfluidic channel by a liquid stream. Such holding structures can be important when it comes to special release mechanisms or they can function as spacer when the entire structure should be metallized.