Performance of magnetically driven MEMS piezoelectric energy harvester and its application as a transducer for a near zero-power wake-up

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 4Sprache: EnglischTyp: PDF

Dankwort, Torben; Gojdka, Bjoern; Nowak, Marc Alexander; Bodduluri, Mani Teja; Gruenzig, Sven; Lofink, Fabian (Fraunhofer Institute for Silicon Technology, Itzehoe, Germany)
Ahmed, Minhaz (Hochschule Furtwangen, Furtwangen im Schwarzwald, Germany)

In this article we present recent results on magnetically driven piezoelectric MEMS energy harvesters. The performance of different harvester designs was determined in resonance and under low-frequency magnetic pulse-like excitation. The latter measurements represent an application-oriented scenario, which allows to harvest energy from e.g., translational and rotational motions. We demonstrate that in resonance power outputs of > 100 muW are achievable. Frequency up-conversion can be facilitated to obtain power outputs of > 10 muW at low frequencies. The power output under frequency up-conversion is sufficient to switch a power MOSFET and initiate a near-zero-power wake-up.