Development of a Fresnel mirror with tunable phase shift and mirror angle

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 3Sprache: EnglischTyp: PDF

Bruno, Binal Poyyathuruthy; Wallrabe, Ulrike (Laboratory for Microactuators, IMTEK – Department of Microsystems Engineering, University of Freiburg, Germany)
Grunwald, Ruediger (Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy, Berlin, Germany)

We present the design and fabrication of a piezoelectrically actuated Fresnel mirror with tunable phase shift and mirror angle. The mirrors are actuated using piezo bimorph beams, wherein the electrode on the beam is structured in a way to achieve independent tuning of the mirror angle and the out-of-plane displacement of the mirrors. The mirror angle is kept constant during the out-of-plane displacement of the mirrors to achieve the phase shift in the reflected light. The fabricated device showed a linear control of the mirror angle; and the vertical displacement of the mirrors can be varied in the range of ±400 nm while keeping the mirror angle constant with an average deviation of 0.4%.