Extended concept for a MEMS and IMS based ion filter

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 4Sprache: EnglischTyp: PDF

Graf, Alexander; Hild, Olaf R. (Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Germany)
Funke, Nils (Fraunhofer Project Hub “Microelectronic and Optical Systems for Biomedicine”, Erfurt, Germany)

Focus of the current work is the development of a miniaturized chip device, the related system and electronic components, to detect volatile organic compounds (VOC) directly in air within the lower ppb concentration range. The use of a differential ion mobility spectrometry (DMS) ion filter in combination with microtechnologies enables small sensor chips that can be produced in high amount of numbers. One basic step in the development is the choice of an appropriate filter together with a device concept. The basic concept of the technology process flow and first results from the chip with test gases are described.