Enhancing the performance of piezoelectric energy harvesters by integrating AlScN piezoelectric thin film

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 3Sprache: EnglischTyp: PDF

Dankwort, Torben; Yarar, Erdem; Gruenzig, Sven; Gojdka, Bjoern; Fichtner, Simon; Lofink, Fabian (Fraunhofer Institute for Silicon Technology, Itzehoe, Germany)

In this article we present recent results on magnetically driven piezoelectric harvester exited via magnetic plucking. A decisive factor determining the performance of piezoelectric harvesters is the piezoelectric material itself. We demonstrate that by replacing AlN thin films with AlScN the power output can be increased significantly while excited under off-resonance conditions.