Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 4Sprache: EnglischTyp: PDF

Prediger, Maren S.; Mueller, Eileen; Bengsch, Sebastian; Wurz, Marc Christopher (Institute of Micro Production Technology, Gottfried Wilhelm Leibniz University Hanover, Germany)

Sensor technology is becoming increasingly important in medical technology and various sensor principles are state of the art. In this work, sensor thin films with anisotropic magnetoresistive effect were deposited on different substrates and compared. Further, the thin filmswere combined with a magnetic elastomer on a plug system to be investigated for its suitability in biomedical applications, such as intracranial pressure measurement. The detection of a step-wise pressure change up to 4 bar was achieved, which is 66-fold higher than target value. The system requires additional adaption to the desired application. Higher pressure regimes than biomedical, however, may be covered with this technology.