Biocompatible pressure-sensitive diaphragms for medical implants

Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2021

Seiten: 3Sprache: EnglischTyp: PDF

Autoren:
Klein, Ann-Kathrin (Institute of Microtechnology, Technische Universität Braunschweig, Braunschweig, Germany & NanoScale Systems, Nanoss GmbH, Darmstadt, Germany)
Burkhardt, Claus (NMI Natural and Medical Sciences Institute at the University of Tübingen, Reutlingen, Germany)
Stamm, Boris; Kaya, Alexander (NanoScale Systems, Nanoss GmbH, Darmstadt, Germany)
Dietzel, Andreas (Institute of Microtechnology, Technische Universität Braunschweig, Braunschweig, Germany)

Inhalt:
Pressures in the human body are important parameters that can give doctors essential information about a patient's health status or the progression of diseases. Therefore, the development of implantable pressure-measuring medical implants is an important element for the improvement of medical diagnostics. Conventional pressure sensors (e.g., piezoresistive or capacitive) present challenges due to the use of non-biocompatible materials or a limited miniaturisability. This paper demonstrates biocompatible pressure-sensitive titanium diaphragms. The titanium diaphragms are directly functionalized with nanogranular tunneling resistors, which we use as strain sensors. The results show that these pressure-sensitive membranes provide a promising approach for medical implants.