High performance four-quadrant actuator

Inhalt:
The combination of piezo actuators with microfluidic systems enables actuators which are well suited for force applications at low power regions but they can typically only the controlled in one quadrant. In this paper, the extension of such an actuator is presented. It is realized without further active elements besides the piezo driven pumps and thus, a very high functional density can be realized. The compact actuator is very robust, lightweight as well as energy efficient and provides a high force density as a standard piezo actuator with a microfluidic system.