A novel method to characterize the correlation between gas diffusion and sodium contamination of anodic bonding
Konferenz: MikroSystemTechnik Kongress 2023 - Kongress
23.10.2023-25.10.2023 in Dresden, Deutschland
Tagungsband: MikroSystemTechnik Kongress 2023
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Zhang, Yucheng; Solazzi, Francesco; Schreiber, Kai; Sorschag, Kurt; Aschauer, Elmar (Infineon Technologies AG, Villach, Austria)
Schiffer, Michael; Lang, Klaus-Dieter (Fraunhofer IZM, Berlin, Germany)
Cselyuszka, Norbert; Andrianov, Nikolai (Silicon Austria Labs, Villach, Austria)
Inhalt:
In this paper, we propose a novel mechanism that relates the sodium (Na) migration process to the gas flow and manage to characterize the influence of sodium contamination by using a twin sensor structure.