Analysis of the Coupling Mechanism between Airborne MEMS Ultra-sonic Transducers and Ultrasonic Horns

Konferenz: MikroSystemTechnik Kongress 2023 - Kongress
23.10.2023-25.10.2023 in Dresden, Deutschland

Tagungsband: MikroSystemTechnik Kongress 2023

Seiten: 4Sprache: EnglischTyp: PDF

Autoren:
Bosetti, Gabriele; Hofstetter-Spona, Stefan; Schrag, Gabriele (Chair of Physics of Electrotechnology, Technical University of Munich, Germany)

Inhalt:
This paper presents the impact of 3D-printed ultrasonic horns on the acoustic performance of airborne membrane-based ultrasonic emitters. Starting from a validated compact model, we analyze the power transferred from the MEMS transducer to the air. We investigate the system taking into consideration three different horn geometries and show the impact of the acoustic configuration on the dynamic behavior of the membrane and on its power efficiency. This work lays the foundation towards the realization of tailored and highly efficient airborne ultrasonic systems.