Sputtered FeCoB Soft Magnetic Thin Films for Surface Acoustic Wave Sensors
Konferenz: MikroSystemTechnik Kongress 2023 - Kongress
23.10.2023-25.10.2023 in Dresden, Deutschland
Tagungsband: MikroSystemTechnik Kongress 2023
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Meyer, Jana Marie; Ghori, Muhammad Zubair; Rickers, Matthias; Bodduluri, Mani Teja; Blohm, Lars; Yarar, Erdem; Giese, Thorsten (Fraunhofer Institut für Siliziumtechnologie, Itzehoe, Deutschland)
Fichtner, Simon; Lofink, Fabian (Fraunhofer Institut für Siliziumtechnologie, Itzehoe, Deutschland & Christian-Albrechts-Universität zu Kiel, Deutschland)
Inhalt:
FeCoB is a promising sensing material for surface acoustic wave (SAW) magnetic field sensors that are based on change of the Young’s modulus (DeltaE effect) of magnetostrictive films due to the soft magnetic properties and the high magneto-striction constant of FeCoB. Standard semiconductor technology on 200 mm silicon wafers can be used for the sensor fabrication. The finished sensor is consisting of a silicon wafer, a sputtered AlScN film that can be excited using interdigital transducers (IDTs), a smoothing SiO2 layer, and a magnetostrictive FeCoB film deposited in an industry compatible, high throughput magnetron sputter system with in-plane uniaxial magnetic anisotropy. The characterization of the SAW magnetic field sensors using FeCoB is presented and shows the feasibility of it as magnetostrictive material, ensuring an industry compatible fabrication.